Photonic curing for high throughput and high-quality oxide dielectric films on films
Author: Dr. Julia Hsu
Institution: University of Texas at Dallas
Oxides and ceramics
Flash lamp annealing: towards thin-film and wide bandgap materials applications
Authors: Dr. Romanyuk & Dr. Gilshtein
Institution: Empa-Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Thin Films and Photovoltaics